JPS646503U - - Google Patents
Info
- Publication number
- JPS646503U JPS646503U JP10219487U JP10219487U JPS646503U JP S646503 U JPS646503 U JP S646503U JP 10219487 U JP10219487 U JP 10219487U JP 10219487 U JP10219487 U JP 10219487U JP S646503 U JPS646503 U JP S646503U
- Authority
- JP
- Japan
- Prior art keywords
- tool microscope
- pattern shapes
- parts
- ccd camera
- measure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims 1
- 239000000969 carrier Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10219487U JPS646503U (en]) | 1987-07-02 | 1987-07-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10219487U JPS646503U (en]) | 1987-07-02 | 1987-07-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS646503U true JPS646503U (en]) | 1989-01-13 |
Family
ID=31331879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10219487U Pending JPS646503U (en]) | 1987-07-02 | 1987-07-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS646503U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03210263A (ja) * | 1990-01-16 | 1991-09-13 | Matsushita Electric Ind Co Ltd | 気泡水流発生装置 |
-
1987
- 1987-07-02 JP JP10219487U patent/JPS646503U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03210263A (ja) * | 1990-01-16 | 1991-09-13 | Matsushita Electric Ind Co Ltd | 気泡水流発生装置 |
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